- Patent Title: Solid-state imaging device and method of manufacturing the device
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Application No.: US15850645Application Date: 2017-12-21
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Publication No.: US10367025B2Publication Date: 2019-07-30
- Inventor: Yoshihiro Sato , Ryohei Miyagawa , Tokuhiko Tamaki , Junji Hirase , Yoshiyuki Ohmori , Yoshiyuki Matsunaga
- Applicant: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2012-143129 20120626
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/363 ; H04N5/378 ; H01L21/266 ; H01L21/8234

Abstract:
Each unit pixel includes a photoelectric converter, an n-type impurity region forming an accumulation diode together with the semiconductor region, the accumulation diode accumulating a signal charge generated by the photoelectric converter, an amplifier transistor including a gate electrode electrically connected to the impurity region, and an isolation region formed around the amplifier transistor and implanted with p-type impurities. The amplifier transistor includes an n-type source/drain region formed between the gate electrode and the isolation region, and a channel region formed under the gate electrode. A gap in the isolation region is, in a gate width direction, wider at a portion including the channel region than at a portion including the source/drain region.
Public/Granted literature
- US20180114811A1 SOLID-STATE IMAGING DEVICE AND METHOD OF MANUFACTURING THE DEVICE Public/Granted day:2018-04-26
Information query
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