Invention Grant
- Patent Title: Micropump having a flowmeter, and method for producing same
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Application No.: US14114009Application Date: 2012-04-27
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Publication No.: US10371135B2Publication Date: 2019-08-06
- Inventor: Yves Fouillet , Olivier Fuchs
- Applicant: Yves Fouillet , Olivier Fuchs
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique at aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique at aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1153644 20110428
- International Application: PCT/EP2012/057852 WO 20120427
- International Announcement: WO2012/146753 WO 20121101
- Main IPC: F04B43/04
- IPC: F04B43/04 ; F04B17/00 ; F04B19/06

Abstract:
A micropump with a deformable membrane, including: a first chamber, one wall of which includes a first deformable membrane portion and an actuator of the first membrane portion; a second chamber including a second deformable membrane portion and a third chamber, including a third deformable membrane portion, the second chamber and the third chamber being connected together through a first channel, at least one of the second and third chambers being connected through a second channel to the first chamber; each of the second chamber and third chamber including a mechanism forming a detection gauge, but not including an activation mechanism.
Public/Granted literature
- US20140044568A1 MICROPUMP HAVING A FLOWMETER, AND METHOD FOR PRODUCING SAME Public/Granted day:2014-02-13
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