Invention Grant
- Patent Title: Batch processing apparatus
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Application No.: US14788127Application Date: 2015-06-30
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Publication No.: US10373860B2Publication Date: 2019-08-06
- Inventor: Mukund Sundararajan , Ananthkrishna Jupudi , Manjunatha Koppa , Saket Rathi
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: F26B3/30
- IPC: F26B3/30 ; F26B13/10 ; H01L21/687

Abstract:
Embodiments of batch processing apparatus and collapsible substrate support are provided herein. In some embodiments, a collapsible substrate support includes a base linearly moveable between a first position and a second position; and a first plurality of substrate support elements coupled to the base and including a lowermost substrate support element disposed in a fixed position with respect to the base and an uppermost substrate support element disposed above the lowermost substrate support element, wherein the uppermost substrate support element is linearly movable between a first position nearer to the lowermost substrate support element and a second position further from the lowermost substrate support element.
Public/Granted literature
- US20170004982A1 BATCH PROCESSING APPARATUS Public/Granted day:2017-01-05
Information query
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