Invention Grant
- Patent Title: Memory devices
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Application No.: US16162720Application Date: 2018-10-17
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Publication No.: US10373975B2Publication Date: 2019-08-06
- Inventor: Seok Cheon Baek , Young Woo Kim , Dong Sik Lee , Min Yong Lee , Woong Seop Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2015-0186005 20151224
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/522 ; H01L23/528 ; H01L27/11521 ; H01L27/11526 ; H01L27/11556 ; H01L27/11568 ; H01L27/11573 ; H01L29/06 ; H01L27/11565 ; H01L27/1157 ; H01L27/11575

Abstract:
A memory device may include multiple channel regions extending in a direction perpendicular to an upper surface of a substrate, a plurality of gate electrode layers and a plurality of insulating layers stacked on the substrate to be adjacent at least a portion of the plurality of channel regions, an interlayer insulating layer disposed on the plurality of gate electrode layers, a plurality of cell contact plugs passing through the interlayer insulating layer. Each of the plurality of cell contacts is connected to each of the plurality of gate electrode layers. A vertical insulating layer extends from the interlayer insulating layer disposed between the plurality of channel regions and the plurality of cell contact plugs and has a portion surrounded by at least one of the plurality of gate electrode layers.
Public/Granted literature
- US20190051664A1 MEMORY DEVICES Public/Granted day:2019-02-14
Information query
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