Invention Grant
- Patent Title: Methods of shielding an embedded MRAM array on an integrated circuit product comprising CMOS based transistors
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Application No.: US15874205Application Date: 2018-01-18
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Publication No.: US10374154B1Publication Date: 2019-08-06
- Inventor: Dimitri Houssameddine , Chenchen Jacob Wang , Bin Liu
- Applicant: GLOBALFOUNDRIES Singapore Pte Ltd
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L27/22 ; H01L43/12 ; H01L43/08

Abstract:
One illustrative method disclosed herein includes forming an MRAM memory array and a plurality of peripheral circuits for an integrated circuit product above a semiconductor substrate, forming a patterned layer of a metal-containing shielding material above the substrate, the patterned layer of metal-containing shielding material covering the MRAM memory array while leaving an area above the plurality of peripheral circuits exposed, and, with the patterned layer of metal-containing shielding material in position, performing a silicon dangling bond passivation anneal process on the integrated circuit product.
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