Invention Grant
- Patent Title: Scanning transmission electron microscope with an objective electromagnetic lens and a method of use thereof
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Application No.: US15926501Application Date: 2018-03-20
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Publication No.: US10381193B2Publication Date: 2019-08-13
- Inventor: Petras Stanislav , Lencova Bohumila , Benner Gerd Ludwig
- Applicant: TESCAN Brno s.r.o. , TESCAN TEMPE, LLC.
- Applicant Address: CZ Brno US AZ Tempe
- Assignee: TESCAN BRNO, S.R.O.,TESCAN TEMPE, LLC
- Current Assignee: TESCAN BRNO, S.R.O.,TESCAN TEMPE, LLC
- Current Assignee Address: CZ Brno US AZ Tempe
- Agency: Hitaffer & Hitaffer, PLLC
- Agent Thedford I Hitaffer
- Priority: EP17000453 20170320
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/141 ; H01J37/244 ; G01N23/2251 ; G01N23/20058 ; H01J37/28

Abstract:
The object of the present invention provides a scanning transmission electron microscope with the ability to formed at least one diffraction pattern. The scanning electron microscope comprises an electron source, which is configured to provide primary electron beam, a condenser lens system, an objective electromagnetic system, a projection lens system and a detection system, in addition, the objective electromagnetic lens consists of an upper pole piece and a lower pole piece, wherein each pole piece comprises a pole piece face, which is a flat surface oriented towards a sample plane. A salient feature of the present invention is to form at least one diffraction pattern located in the distance from the lower pole piece face outside the pole piece gap, wherein the pole piece gap is the space between the upper pole piece face and the lower pole piece face.
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