Invention Grant
- Patent Title: Dialkylzinc partial hydrolysate-containing solution and method of production of zinc oxide thin film using the solution
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Application No.: US15574746Application Date: 2016-05-10
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Publication No.: US10381488B2Publication Date: 2019-08-13
- Inventor: Kouji Toyota , Koichiro Inaba , Toshio Naka
- Applicant: Tosoh Finechem Corporation
- Applicant Address: JP Yamaguchi
- Assignee: Tosoh Finechem Corporation
- Current Assignee: Tosoh Finechem Corporation
- Current Assignee Address: JP Yamaguchi
- Agency: Panitch Schwarze Belisario & Nadel LLP
- Priority: JP2015-101817 20150519
- International Application: PCT/JP2016/063823 WO 20160510
- International Announcement: WO2016/185939 WO 20161124
- Main IPC: C01G9/02
- IPC: C01G9/02 ; H01B1/22 ; H01B5/14 ; C03C17/25 ; C23C18/12 ; H01L29/786

Abstract:
A dialkylzinc partial hydrolysate-containing solution which can be handled in air and can form a zinc oxide thin film in air and a method for producing the zinc oxide thin film are provided. The dialkylzinc partial hydrolysate-containing solution contains a partial hydrolysate of dialkyl zinc represented by general formula (1) and a solvent which has a boiling point of 160° C. or higher, an amide structure represented by general formula (2), and which is an organic compound having a cyclic structure. The partial hydrolysate is the dialkylzinc hydrolyzed with water in a molar ratio in the range of 0.4 to 0.9 with respect to zinc in the dialkylzinc. A method for producing the zinc oxide thin film by applying the dialkylzinc partial hydrolysate-containing solution to a base material is also provided.
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