Invention Grant
- Patent Title: Detection device for detecting thickness of vacuum-evaporated film and vacuum evaporation apparatus
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Application No.: US15224760Application Date: 2016-08-01
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Publication No.: US10385445B2Publication Date: 2019-08-20
- Inventor: Wenbin Jia , Rui Peng , Xinxin Wang , Feifei Zhu , Xinwei Gao
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: CN201610007049 20160105
- Main IPC: C23C14/52
- IPC: C23C14/52 ; C23C14/54 ; C23C14/24 ; H01L41/04 ; G01B17/02 ; G01B11/06

Abstract:
Embodiments of the present invention disclose a detection device for detecting a thickness of a vacuum-evaporated film and a vacuum evaporation apparatus, thereby solving, for example, a problem that a conventional detection device results in excessively high production cost due to frequent replacement of a crystal plate. The detection device includes: a crystal plate, a detection structure provided with an opening corresponding to the crystal plate such that evaporated molecules or atoms are deposited on the crystal plate through the opening; and a filter disposed between the opening and the crystal plate.
Public/Granted literature
- US20170191156A1 DETECTION DEVICE FOR DETECTING THICKNESS OF VACUUM-EVAPORATED FILM AND VACUUM EVAPORATION APPARATUS Public/Granted day:2017-07-06
Information query
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