Invention Grant
- Patent Title: Patterning device cooling apparatus
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Application No.: US16090713Application Date: 2017-03-08
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Publication No.: US10394139B2Publication Date: 2019-08-27
- Inventor: Güneş Nak{dot over (i)}bo{hacek over (g)}lu , Lowell Lane Baker , Ruud Hendrikus Martinus Johannes Bloks , Hakki Ergün Cekli , Geoffrey Alan Schultz , Laurentius Johannes Adrianus Van Bokhoven , Frank Johannes Jacobus Van Boxtel , Jean-Philippe Xavier Van Damme , Christopher Charles Ward
- Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
- Applicant Address: NL Veldhoven NL Veldhoven
- Assignee: ASML Holding N.V.,ASML Netherlands B.V.
- Current Assignee: ASML Holding N.V.,ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2017/055407 WO 20170308
- International Announcement: WO2017/174284 WO 20171012
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A patterning apparatus for a lithographic apparatus, the patterning apparatus including a patterning device support structure configured to support a patterning device having a planar surface; a patterning device conditioning system including a first gas outlet configured to provide a first gas flow over the planar surface in use and a second gas outlet configured to provide a second gas flow over the planar surface in use, wherein the first gas outlet and the second gas outlet are arranged at different distances perpendicular to the planar surface; and a control system configured to independently control a first momentum of gas exiting the first gas outlet and a second momentum of gas exiting the second gas outlet or to independently vary the first gas flow and/or the second gas flow over the planar surface of the patterning device.
Public/Granted literature
- US20190121248A1 PATTERNING DEVICE COOLING APPARATUS Public/Granted day:2019-04-25
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