Invention Grant
- Patent Title: Integrated circuit device
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Application No.: US15951385Application Date: 2018-04-12
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Publication No.: US10396205B2Publication Date: 2019-08-27
- Inventor: Mun-hyeon Kim , Sung-man Whang , Chang-woo Noh , Dong-won Kim , Han-su Oh
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2017-0126350 20170928
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/06 ; H01L29/66 ; H01L29/78 ; H01L21/8232

Abstract:
An integrated circuit device includes a base burying insulating film covering a lower side wall of a fin-type active region on a substrate, an isolation pattern having a top surface higher than a top surface of the base burying insulating film, and a gate line covering a channel section of the fin-type active region. The gate line has an upper gate covering an upper portion of the channel section and a lower gate protruding from the upper gate toward the substrate and filling a space between a lower side wall of the channel section and an upper side wall of the isolation pattern.
Public/Granted literature
- US20190097054A1 INTEGRATED CIRCUIT DEVICE Public/Granted day:2019-03-28
Information query
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