- Patent Title: Mask frame assembly for thin layer deposition, method of manufacturing the same, and method of manufacturing display apparatus by using the mask frame assembly
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Application No.: US15668071Application Date: 2017-08-03
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Publication No.: US10396282B2Publication Date: 2019-08-27
- Inventor: Sangshin Lee , Kookchol Park
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd
- Current Assignee: Samsung Display Co., Ltd
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2015-0059774 20150428
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/56 ; C23C16/04

Abstract:
A mask frame assembly through which a deposition material to be deposited on a substrate passes, the mask frame assembly includes a frame including an opening, and a mask having first and second ends in a length direction thereof coupled to the frame, in which the mask includes a main body part having a first thickness and including a pattern part, the pattern part including pattern holes through which the deposition material passes and a support part having a second thickness greater than the first thickness and extending away from first and second ends of the main body part.
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