Invention Grant
- Patent Title: Ion beam etching devices
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Application No.: US15198416Application Date: 2016-06-30
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Publication No.: US10403473B2Publication Date: 2019-09-03
- Inventor: Han-Na Cho , Jong-Kyu Kim , Hyuk Kim , Jongchul Park
- Applicant: Han-Na Cho , Jong-Kyu Kim , Hyuk Kim , Jongchul Park
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0135697 20150924
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
An ion beam etching device comprises: an ion source configured to generate ions; a grid on a side of the ion source, the grid configured to accelerate the generated ions to generate an ion beam; a process chamber configured to have an etching process using the ion beam performed therein; and a variable magnetic field application part adjacent to the process chamber, the variable magnetic field application part configured to apply a variable magnetic field.
Public/Granted literature
- US20170092465A1 ION BEAM ETCHING DEVICES Public/Granted day:2017-03-30
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