The present disclosure discloses an inspection device, an inspection method and an inspection system. The device comprises a distributed ray source comprising multiple source points; a light source collimator configured to converge the rays generated by the distributed ray source to form an inverted fan-shaped ray beam; a scatter collimator configured to only allow rays scattered at one or more particular scattering angles which are generated by the rays from the light source collimator interacting with inspected objects to pass; at least one detector each comprising multiple detection units which have an energy resolution capability and are substantially arranged in a cylindrical surface to receive the scattered rays passing through the scatter collimator; and a processing apparatus configured to calculate energy spectrum information of the scattered rays from the inspected objects based on a signal output by the detectors.