- 专利标题: Apparatus and method for plasma treatment of containers
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申请号: US13318962申请日: 2010-05-06
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公开(公告)号: US10410838B2公开(公告)日: 2019-09-10
- 发明人: Daniel R. Hanson , Moses M. David , David J. White , Jean A. Kelly , Todd D. Alband
- 申请人: Daniel R. Hanson , Moses M. David , David J. White , Jean A. Kelly , Todd D. Alband
- 申请人地址: US MN St. Paul
- 专利权人: 3M Innovative Properties Company
- 当前专利权人: 3M Innovative Properties Company
- 当前专利权人地址: US MN St. Paul
- 国际申请: PCT/US2010/033884 WO 20100506
- 国际公布: WO2010/129783 WO 20101111
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; A61M15/00 ; B05D1/00 ; B05D3/14 ; B05D5/08 ; B05D7/22 ; C23C16/04 ; C23C16/455
摘要:
An apparatus (9) for plasma treating multiple containers. The apparatus includes a manifold (2) comprising at least a first chamber with multiple outlet openings and multiple hollow, electrically-conductive nozzles (10) for at least one of delivering or exhausting plasma-generating gas. The multiple hollow, electrically-conductive nozzles are connected to the multiple outlet openings and protrude from the manifold. A method of plasma treating multiple containers is also disclosed. The method includes providing a reactor system comprising an apparatus disclosed herein, inserting the multiple hollow, electrically-conductive nozzles into the multiple containers (30), evacuating the multiple containers, grounding the multiple hollow, electrically-conductive nozzles while applying radio frequency power to the multiple containers, providing a gas inside the containers, and generating a plasma. At least one of evacuating or providing the gas is carried out through the hollow, electrically-conductive nozzles.
公开/授权文献
- US20120045590A1 APPARATUS AND METHOD FOR PLASMA TREATMENT OF CONTAINERS 公开/授权日:2012-02-23
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