Invention Grant
- Patent Title: Interconnect capping process for integration of MRAM devices and the resulting structures
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Application No.: US16069165Application Date: 2016-03-28
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Publication No.: US10418415B2Publication Date: 2019-09-17
- Inventor: Christopher J. Wiegand , Oleg Golonzka , MD Tofizur Rahman , Brian S. Doyle , Mark L. Doczy , Kevin P. O'Brien , Kaan Oguz , Tahir Ghani , Satyarth Suri
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2016/024555 WO 20160328
- International Announcement: WO2017/171716 WO 20171005
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/02 ; H01L43/10 ; H01L43/12 ; G11C11/16 ; H01F10/32 ; H01F41/32 ; H01L21/768 ; H01L23/528 ; H01L23/532 ; H01L21/027 ; H01L21/311 ; H01L21/321 ; H01L21/3213

Abstract:
Approaches for an interconnect cladding process for integrating magnetic random access memory (MRAM) devices, and the resulting structures, are described. In an example, a memory structure includes an interconnect disposed in a trench of a dielectric layer above a substrate, the interconnect including a diffusion barrier layer disposed at a bottom of and along sidewalls of the trench to an uppermost surface of the dielectric layer, a conductive fill layer disposed on the diffusion barrier layer and recessed below the uppermost surface of the dielectric layer and an uppermost surface of the diffusion barrier layer, and a conductive capping layer disposed on the conductive fill layer and between sidewall portions of the diffusion barrier layer. A memory element is disposed on the conductive capping layer of the interconnect.
Public/Granted literature
- US20190027537A1 INTERCONNECT CAPPING PROCESS FOR INTEGRATION OF MRAM DEVICES AND THE RESULTING STRUCTURES Public/Granted day:2019-01-24
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