Invention Grant
- Patent Title: Condenser microphone with non-circular membrane
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Application No.: US15121831Application Date: 2014-03-03
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Publication No.: US10419858B2Publication Date: 2019-09-17
- Inventor: Jan Tue Ravnkilde , Dennis Mortensen , Morten Ginnerup
- Applicant: Epcos AG
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Nixon Peabody LLP
- International Application: PCT/EP2014/054094 WO 20140303
- International Announcement: WO2015/131925 WO 20150911
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B06B1/02 ; B81B3/00 ; H04R7/16 ; H04R19/00
Abstract:
A non-uniform stress distribution of a MEMS microphone having a non-circular shape is compensated by a structured back plate that has a compensating structure to provide a stress distribution opposite to that of the membrane.
Public/Granted literature
- US20170078802A1 CONDENSER MICROPHONE WITH NON-CIRCULAR MEMBRANE Public/Granted day:2017-03-16
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