Invention Grant
- Patent Title: High-Chi block copolymers for directed self-assembly
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Application No.: US14599103Application Date: 2015-01-16
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Publication No.: US10421878B2Publication Date: 2019-09-24
- Inventor: Kui Xu , Mary Ann Hockey , Eric Calderas
- Applicant: Brewer Science Inc.
- Applicant Address: US MO Rolla
- Assignee: Brewer Science, Inc.
- Current Assignee: Brewer Science, Inc.
- Current Assignee Address: US MO Rolla
- Agency: Hovey Williams LLP
- Main IPC: C09D153/00
- IPC: C09D153/00 ; C08F293/00 ; G03F7/00

Abstract:
Compositions for directed self-assembly (DSA) patterning techniques are provided. Methods for directed self-assembly are also provided in which a DSA composition comprising a block copolymer (BCP) is applied to a substrate and then self-assembled to form the desired pattern. The block copolymer includes at least two blocks and is selected to have a high interaction parameter (χ). The BCPs are able to form perpendicular lamellae by simple thermal annealing on a neutralized substrate, without a top coat. The BCPs are also capable of micro-phase separating into lines and spaces measuring at 10 nm or smaller, with sub-20-nm L0 capability.
Public/Granted literature
- US20150197594A1 HIGH-CHI BLOCK COPOLYMERS FOR DIRECTED SELF-ASSEMBLY Public/Granted day:2015-07-16
Information query
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