Invention Grant
- Patent Title: Film formation apparatus and film formation method
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Application No.: US15457443Application Date: 2017-03-13
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Publication No.: US10422037B2Publication Date: 2019-09-24
- Inventor: Masato Kon
- Applicant: TOPPAN PRINTING CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TOPPAN PRINTING CO., LTD.
- Current Assignee: TOPPAN PRINTING CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP2014-191090 20140919
- Main IPC: C23C16/54
- IPC: C23C16/54 ; C23C16/455 ; C23C16/44 ; C23C16/52

Abstract:
A film formation apparatus and a film formation method that can homogenize the distribution of gas in each zone in a chamber and improve film formation precision are provided. A film formation apparatus according to one embodiment includes: a chamber which includes a plurality of zones into which gas is introduced, and a plurality of discharge ports that discharge the gas located in at least any of the zones and that can individually adjust an opening state; and a transportation unit that transports a substrate so as to pass through the plurality of the zones in the chamber.
Public/Granted literature
- US20170183774A1 FILM FORMATION APPARATUS AND FILM FORMATION METHOD Public/Granted day:2017-06-29
Information query
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