Invention Grant
- Patent Title: Probe card alignment
-
Application No.: US15795307Application Date: 2017-10-27
-
Publication No.: US10422817B2Publication Date: 2019-09-24
- Inventor: Martin Eckert , Roland Dieterle , Siegfried Tomaschko
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Stosch Sabo
- Main IPC: G01R1/073
- IPC: G01R1/073 ; G01R31/28

Abstract:
An adjustable load transmitter for adjusting an alignment between a probe card and a bridge beam of a wafer prober, where the probe card is separated from the bridge beam by a gap. The adjustable load transmitter located in the gap, the adjustable load transmitter comprising two rotatable plates adapted for transmitting a load via a load transmission path between the bridge beam and the wafer prober and each comprising two flat, non-parallel contact faces. The adjustable load transmitter removes an angular misalignment between the bridge beam and the set of plates by rotating each of the rotatable plates about a pre-determined adjustment angle such that two angles of inclination are adjusted to zero. The adjustable load transmitter establishes the load transmission path by closing a clearance between the bridge beam and the contact face.
Public/Granted literature
- US20190018044A1 PROBE CARD ALIGNMENT Public/Granted day:2019-01-17
Information query