This disclosure relates to a Metal-Semiconductor-Metal (MSM) photoelectric detection device, a method of driving the MSM photoelectric detection device, and an X-Ray detector. The device comprises: a plurality of detection units each including: at least one first MSM structure, at least one second MSM structure, a first control unit, a second control unit, a third control unit, a threshold comparison unit, and an energy storage unit, wherein the first control unit is used for controlling the output/reset signal terminal to be connected to or disconnected from the first node; the second control unit is used for controlling the first node to be connected to or disconnected from the second MSM structure; the threshold comparison unit is used for outputting an ON control signal or an OFF control signal; the third control signal is used for connecting or disconnecting the first node to or from the second MSM structure under the control of the control signal outputted by the threshold comparison unit; the energy storage unit is used for storing charges. This disclosure is used for manufacturing the MSM photoelectric detection device.