Method of manufacturing organic light-emitting display apparatus using barrier layer having high fluorine content
Abstract:
A method of manufacturing an organic light-emitting display apparatus including: forming a lift-off layer including a fluoropolymer, a barrier layer having a higher fluorine content than the lift-off layer, and a photoresist on a substrate including a first electrode; removing a portion corresponding to the first electrode by patterning the photoresist, and leaving the remaining portion; exposing the first electrode by etching the lift-off layer and the barrier layer on the first electrode; forming an organic functional layer on the first electrode and on the remaining photoresist; removing the barrier layer, the photoresist, and the organic functional layer on the remaining lift-off layer; and forming a second electrode on the organic functional layer on the first electrode.
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