Invention Grant
- Patent Title: Method of manufacturing organic light-emitting display apparatus using barrier layer having high fluorine content
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Application No.: US15884241Application Date: 2018-01-30
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Publication No.: US10431744B2Publication Date: 2019-10-01
- Inventor: Younggil Kwon , Seungyong Song
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2017-0030312 20170310
- Main IPC: H01L51/00
- IPC: H01L51/00 ; G03F7/00 ; G03F7/20 ; G03F7/26 ; G03F7/09 ; G03F7/16 ; H01L51/52 ; H01L51/50 ; H01L27/32

Abstract:
A method of manufacturing an organic light-emitting display apparatus including: forming a lift-off layer including a fluoropolymer, a barrier layer having a higher fluorine content than the lift-off layer, and a photoresist on a substrate including a first electrode; removing a portion corresponding to the first electrode by patterning the photoresist, and leaving the remaining portion; exposing the first electrode by etching the lift-off layer and the barrier layer on the first electrode; forming an organic functional layer on the first electrode and on the remaining photoresist; removing the barrier layer, the photoresist, and the organic functional layer on the remaining lift-off layer; and forming a second electrode on the organic functional layer on the first electrode.
Public/Granted literature
- US20180261769A1 ORGANIC LIGHT-EMITTING DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2018-09-13
Information query
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