Invention Grant
- Patent Title: Adaptive automatic defect classification
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Application No.: US14991901Application Date: 2016-01-08
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Publication No.: US10436720B2Publication Date: 2019-10-08
- Inventor: Li He , Martin Plihal , Huajun Ying , Anadi Bhatia , Amitoz Singh Dandiana , Ramakanth Ramini
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tenfor Corp.
- Current Assignee: KLA-Tenfor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G06N20/00 ; G01N21/88 ; H01L21/66

Abstract:
Methods and systems for classifying defects detected on a specimen with an adaptive automatic defect classifier are provided. One method includes creating a defect classifier based on classifications received from a user for different groups of defects in first lot results and a training set of defects that includes all the defects in the first lot results. The first and additional lot results are combined to create cumulative lot results. Defects in the cumulative lot results are classified with the created defect classifier. If any of the defects are classified with a confidence below a threshold, the defect classifier is modified based on a modified training set that includes the low confidence classified defects and classifications for these defects received from a user. The modified defect classifier is then used to classify defects in additional cumulative lot results.
Public/Granted literature
- US20170082555A1 Adaptive Automatic Defect Classification Public/Granted day:2017-03-23
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