Invention Grant
- Patent Title: Fabricating non-uniform diffraction gratings
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Application No.: US15723851Application Date: 2017-10-03
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Publication No.: US10436958B2Publication Date: 2019-10-08
- Inventor: Mauro Melli , Christophe Peroz
- Applicant: Magic Leap, Inc.
- Applicant Address: US FL Plantation
- Assignee: Magic Leap, Inc.
- Current Assignee: Magic Leap, Inc.
- Current Assignee Address: US FL Plantation
- Agency: Fish & Richardson P.C
- Main IPC: G02B5/18
- IPC: G02B5/18 ; H01J37/305 ; G02B27/42 ; H01J37/317 ; G02B6/124 ; G02B6/136 ; G02B27/01 ; G02B6/12

Abstract:
A method of fabricating non-uniform gratings includes implanting different densities of ions into corresponding areas of a substrate, patterning, e.g., by lithography, a resist layer on the substrate, etching the substrate with the patterned resist layer, and then removing the resist layer from the substrate, leaving the substrate with at least one grating having non-uniform characteristics associated with the different densities of ions implanted in the areas. The method can further include using the substrate having the grating as a mold to fabricate a corresponding grating having corresponding non-uniform characteristics, e.g., by nanoimprint lithography.
Public/Granted literature
- US20180095201A1 FABRICATING NON-UNIFORM DIFFRACTION GRATINGS Public/Granted day:2018-04-05
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