Invention Grant
- Patent Title: Capacitive transducer and acoustic sensor
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Application No.: US15753521Application Date: 2017-01-31
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Publication No.: US10440481B2Publication Date: 2019-10-08
- Inventor: Takashi Kasai , Koji Momotani , Mariko Terasaka
- Applicant: OMRON Corporation
- Applicant Address: JP Kyoto
- Assignee: OMRON Corporation
- Current Assignee: OMRON Corporation
- Current Assignee Address: JP Kyoto
- Agency: Osha Liang LLP
- Priority: JP2016-047305 20160310
- International Application: PCT/JP2017/003354 WO 20170131
- International Announcement: WO2017/154414 WO 20170914
- Main IPC: H04R19/04
- IPC: H04R19/04 ; B81B3/00 ; H01L29/84 ; H04R19/00

Abstract:
A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being deformable to have a deformation converted into a change in capacitance between the vibration electrode film and the back plate, the vibration electrode film having a through-hole as a pressure relief hole, and a protrusion integral with and formed from the same member as the back plate, the protrusion being placeable in the pressure relief hole before the vibration electrode film deforms. The protrusion and the pressure relief hole have a gap therebetween defining an airflow channel as a pressure relief channel.
Public/Granted literature
- US20180249257A1 CAPACITIVE TRANSDUCER AND ACOUSTIC SENSOR Public/Granted day:2018-08-30
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