Invention Grant
- Patent Title: Biasing of electromechanical systems transducer with alternating-current voltage waveform
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Application No.: US15872019Application Date: 2018-01-16
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Publication No.: US10440482B2Publication Date: 2019-10-08
- Inventor: Axel Thomsen
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Main IPC: H04R29/00
- IPC: H04R29/00 ; H04R19/04 ; H04R3/06 ; H04R19/00 ; H03G3/30 ; H04R7/04

Abstract:
A MEMS microphone may include a backplate comprising first and second electrodes electrically isolated from one another and mechanically coupled to the backplate in a fixed relationship relative to the backplate and a diaphragm configured to displace relative to the backplate as a function of sound pressure incident upon the diaphragm, the diaphragm comprising third and fourth electrodes electrically isolated from one another and mechanically coupled to the diaphragm in a fixed relationship relative to the diaphragm such that the third and fourth electrodes displace relative to the backplate as a function of sound pressure incident upon the diaphragm. The first and third electrodes may form a first capacitor and the second and fourth electrodes may form a second capacitor, the capacitance of each which may be a function of the displacement of the diaphragm, and each of which may be biased by an alternating-current voltage waveform.
Public/Granted literature
- US20180152794A1 BIASING OF ELECTROMECHANICAL SYSTEMS TRANSDUCER WITH ALTERNATING-CURRENT VOLTAGE WAVEFORM Public/Granted day:2018-05-31
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