- 专利标题: Ray beam guiding device and ray inspection apparatus having the same
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申请号: US15578138申请日: 2016-07-12
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公开(公告)号: US10446288B2公开(公告)日: 2019-10-15
- 发明人: Zhiqiang Chen , Yuanjing Li , Ziran Zhao , Wanlong Wu , Junli Li , Ming Ruan , Guangwei Ding
- 申请人: Nuctech Company Limited , Nuctech Jiangsu Company Limited
- 申请人地址: CN Beijing CN Jiangsu
- 专利权人: Nuctech Company Limited,Nuctech Jiangsu Company Limited
- 当前专利权人: Nuctech Company Limited,Nuctech Jiangsu Company Limited
- 当前专利权人地址: CN Beijing CN Jiangsu
- 代理机构: Schwegman Lundberg & Woessner, P.A.
- 优先权: CN201510751171 20151106
- 国际申请: PCT/CN2016/089770 WO 20160712
- 国际公布: WO2017/076057 WO 20170511
- 主分类号: G21K1/02
- IPC分类号: G21K1/02 ; G01N23/223 ; H05G1/02 ; G21F3/00
摘要:
The present invention provides a ray beam guiding device for guiding a ray beam in a ray inspection apparatus. The ray beam guiding device is provided in a housing of the ray inspection apparatus, and two ends of the ray beam guiding device are connected to a front collimator and a rear collimator, respectively. The ray beam guiding device comprises a plurality of guiding walls and a guiding cavity surrounded by the guiding walls. The guiding wall is formed of a first material which is capable of absorbing rays or the first material is coated on an inside of the guiding wall, and the guiding cavity has a central axis extending in a direction from the rear collimator to the front collimator, and the ray beam guiding device further comprises at least one fin plate provided in the guiding cavity of the ray beam guiding device. The at least one fin plate is configured for blocking and/or absorbing scattered rays.
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