发明授权
- 专利标题: Image sensor chip
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申请号: US16172044申请日: 2018-10-26
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公开(公告)号: US10446593B2公开(公告)日: 2019-10-15
- 发明人: Laurent Gay , Francois Guyader
- 申请人: STMicroelectronics (Crolles 2) SAS
- 申请人地址: FR Crolles
- 专利权人: STMicroelectronics (Crolles 2) SAS
- 当前专利权人: STMicroelectronics (Crolles 2) SAS
- 当前专利权人地址: FR Crolles
- 代理机构: Crowe & Dunlevy
- 优先权: FR1661440 20161124
- 主分类号: H01L27/144
- IPC分类号: H01L27/144 ; H01L27/146
摘要:
An image sensor chip includes a semiconductor layer intended to receive illumination on a back face and comprising a matrix of pixels on a front face. An interconnection structure is arranged on the front face and a carrier is attached to the interconnection structure with a first face of the carrier facing the front face. An annular trench, arranged on a perimeter of the image sensor chip, extends from a second face of the carrier through an entire thickness of the carrier and into the interconnection structure. A via opening, arranged within the annual trench, extends from the second face of the carrier through the entire thickness of the carrier to reach a metal portion of the interconnection structure. The via opening an annual trench are lined with an insulating layer. The via opening include a metal conductor making an electrical connection to the metal portion.
公开/授权文献
- US20190067342A1 IMAGE SENSOR CHIP 公开/授权日:2019-02-28
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