Invention Grant
- Patent Title: Vibration transducer
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Application No.: US15808227Application Date: 2017-11-09
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Publication No.: US10447231B2Publication Date: 2019-10-15
- Inventor: Takeshi Mishima , Hiroshi Suzuki
- Applicant: Yokogawa Electric Corporation
- Applicant Address: JP Tokyo
- Assignee: Yokogawa Electric Corporation
- Current Assignee: Yokogawa Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2016-221092 20161114
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/24 ; H03H9/10 ; B81B7/00 ; B81C1/00

Abstract:
A vibration transducer includes a silicon substrate, a first oxide film formed on the silicon substrate, an activation layer formed on the first oxide film, a second oxide film formed on the activation layer, a polysilicon layer formed on the second oxide film, and a substrate contact part. A vibrator, a vibrator electrode electrically conducted with the vibrator, a fixed electrode close to the vibrator and a vacuum chamber configured to surround the vibrator are formed in the activation layer. The polysilicon layer forms a shell. The substrate contact part is configured to electrically conduct the polysilicon layer and the silicon substrate, and is formed to continuously surround the vacuum chamber in a region, in which the vibrator, the vibrator electrode and the fixed electrode of the activation layer are not formed, of the activation layer.
Public/Granted literature
- US20180138887A1 VIBRATION TRANSDUCER Public/Granted day:2018-05-17
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