Invention Grant
- Patent Title: Vapor cell comprising electro-optic function for chip-scale atomic clock, and method for manufacturing sealed container for chip-scale instrument
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Application No.: US15747734Application Date: 2016-07-29
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Publication No.: US10447286B2Publication Date: 2019-10-15
- Inventor: Jong Cheol Park , Hee Yeoun Kim , Chung Mo Yang , Tae Hyun Kim
- Applicant: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Daejeon
- Assignee: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: KR Daejeon
- Agency: Mayer & Williams, PC
- Agent Stuart H. Mayer
- Priority: KR10-2015-0108253 20150730
- International Application: PCT/KR2016/008332 WO 20160729
- International Announcement: WO2017/018846 WO 20170202
- Main IPC: G04F5/14
- IPC: G04F5/14 ; H03L1/04 ; H03L7/26 ; H01L21/02 ; B81B7/00

Abstract:
According to the present invention, since a silicon body itself supporting first and second glass substrates also has a role of an electric heating device, the temperature of the inside of a through-part can be maintained to be constant. In addition, since it is unnecessary to comprise a separate electric heating device such as a heater or to form an additional heating pattern in order to control the temperature of the inside of the through-part, a process for manufacturing a vapor cell can be simplified. According to the present invention, only a reactive material in a gas state and a buffer gas can be injected into a sealed container without the intervention of other materials, and the size of the sealed container can be reduced since it is unnecessary to prepare e separate space for mounting a pill of the reaction material in a vapor cell region itself.
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