- 专利标题: External gettering method and device
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申请号: US15395169申请日: 2016-12-30
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公开(公告)号: US10453761B2公开(公告)日: 2019-10-22
- 发明人: Michael Tan , Cheng P. Pour
- 申请人: Micron Technology, Inc.
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Perkins Coie LLP
- 主分类号: H01L23/26
- IPC分类号: H01L23/26 ; H01L21/322 ; H01L23/31 ; H01L21/56 ; H01L23/00 ; H01L27/146 ; H01L31/18 ; H01L51/52
摘要:
Disclosed embodiments include external gettering provided by electronic packaging. An external gettering element for a semiconductor substrate, which may be incorporated as part of an electronic packaging for the structure, is disclosed. Semiconductor structures and stacked semiconductor structures including an external gettering element are also disclosed. An encapsulation mold compound providing external gettering is also disclosed. Methods of fabricating such devices are also disclosed.
公开/授权文献
- US20170110381A1 EXTERNAL GETTERING METHOD AND DEVICE 公开/授权日:2017-04-20
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