Invention Grant
- Patent Title: Methods of manufacturing vertical memory devices
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Application No.: US16117036Application Date: 2018-08-30
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Publication No.: US10453859B2Publication Date: 2019-10-22
- Inventor: Kohji Kanamori , Shin-Hwan Kang , Young-Woo Park , Jung-Hoon Park
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2016-0010401 20160128
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/423 ; H01L29/788 ; H01L49/02

Abstract:
A vertical memory device includes insulating interlayer patterns, of gate electrodes, a channel, and a charge storage pattern structure. The insulating interlayer patterns are spaced in a first direction. The gate electrodes between are neighboring insulating interlayer patterns, respectively. The channel extends through the insulating interlayer patterns and the gate electrodes in the first direction. The charge storage pattern structure includes a tunnel insulation pattern, a charge trapping pattern structure, and a blocking pattern sequentially stacked between the channel and each of the gate electrodes in a second direction. The charge trapping pattern structure includes charge trapping patterns spaced in the first direction. The charge trapping patterns are adjacent to sidewalls of first gate electrodes, respectively. A first charge trapping pattern extends in the first direction along a sidewall of a first insulating interlayer pattern.
Public/Granted literature
- US20190013330A1 METHODS OF MANUFACTURING VERTICAL MEMORY DEVICES Public/Granted day:2019-01-10
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