Invention Grant
- Patent Title: Oxide thin film transistor, method of manufacturing the same, and display panel and display device including the oxide thin film transistor
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Application No.: US15858065Application Date: 2017-12-29
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Publication No.: US10453944B2Publication Date: 2019-10-22
- Inventor: Jaeyoon Park , SeHee Park , HyungJoon Koo , Kwanghwan Ji , PilSang Yun
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Polsinelli PC
- Priority: KR10-2016-0184468 20161230
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/786 ; H01L27/12 ; H01L29/04 ; H01L21/02

Abstract:
Disclosed are an oxide thin film transistor (TFT), a method of manufacturing the same, a display panel including the oxide TFT, and a display device including the display panel, in which a crystalline oxide semiconductor is provided on a metal insulation layer including metal through a metal organic chemical vapor deposition (MOCVD) process. The oxide TFT includes a metal insulation layer including metal, a crystalline oxide semiconductor adjacent to the metal insulation layer, a gate including metal, a gate insulation layer between the crystalline oxide semiconductor and the gate, a first conductor in one end of the crystalline oxide semiconductor, and a second conductor in another end of the crystalline oxide semiconductor.
Public/Granted literature
Information query
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