- Patent Title: Pressure sensor with real time health monitoring and compensation
-
Application No.: US15343975Application Date: 2016-11-04
-
Publication No.: US10458870B2Publication Date: 2019-10-29
- Inventor: Lei Gu , Paul Lucas , Stephen F. Bart , Phillip W. Sullivan
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Cesari and McKenna, LLP
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L27/00 ; G01L19/00
Abstract:
A pressure sensor may measure gas or liquid pressure. A chamber may have an inlet that receives the gas or liquid. A flexible diaphragm may be within the chamber that has a surface exposed to the gas or liquid after it flows through the inlet. A pressure sensor system may sense changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid. A pressure-insensitive sensor system may sense changes in the flexible diaphragm that are not caused by changes in the pressure of the gas or liquid. The pressure-insensitive sensor system may be insensitive to changes in the flexible diaphragm caused by changes in the pressure of the gas or liquid.
Public/Granted literature
- US20170074742A1 PRESSURE SENSOR WITH REAL TIME HEALTH MONITORING AND COMPENSATION Public/Granted day:2017-03-16
Information query
