Invention Grant
- Patent Title: Probe systems and methods
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Application No.: US15708681Application Date: 2017-09-19
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Publication No.: US10459006B2Publication Date: 2019-10-29
- Inventor: Gavin Neil Fisher , Thomas Reiner Thaerigen , Peter McCann , Rodney Jones , Koby L. Duckworth
- Applicant: Cascade Microtech, Inc.
- Applicant Address: US OR Beaverton
- Assignee: FormFactor Beaverton, Inc.
- Current Assignee: FormFactor Beaverton, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: DASCENZO Intellectual Property Law, P.C.
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R1/067 ; G01R35/00 ; G01R31/28 ; G01R1/073

Abstract:
Probe systems and methods are disclosed herein. The methods include directly measuring a distance between a first manipulated assembly and a second manipulated assembly, contacting first and second probes with first and second contact locations, providing a test signal to an electrical structure, and receiving a resultant signal from the electrical structure. The methods further include characterizing at least one of a probe system and the electrical structure based upon the distance. In one embodiment, the probe systems include a measurement device configured to directly measure a distance between a first manipulated assembly and a second manipulated assembly. In another embodiment, the probe systems include a probe head assembly including a platen, a manipulator operatively attached to the platen, a vector network analyzer (VNA) extender operatively attached to the manipulator, and a probe operatively attached to the VNA extender.
Public/Granted literature
- US20180088149A1 PROBE SYSTEMS AND METHODS Public/Granted day:2018-03-29
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