发明授权
- 专利标题: Well-based integration of heteroepitaxial N-type transistors with P-type transistors
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申请号: US15577734申请日: 2015-06-26
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公开(公告)号: US10461082B2公开(公告)日: 2019-10-29
- 发明人: Willy Rachmady , Matthew V. Metz , Gilbert Dewey , Chandra S. Mohapatra , Jack T. Kavalieros , Anand S. Murthy , Nadia M. Rahhal-Orabi , Tahir Ghani
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Green, Howard & Mughal LLP
- 国际申请: PCT/US2015/038091 WO 20150626
- 国际公布: WO2016/209281 WO 20161229
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/8238 ; H01L21/8258 ; H01L29/10
摘要:
Non-silicon fin structures extend from a crystalline heteroepitaxial well material in a well recess of a substrate. III-V finFETs may be formed on the fin structures within the well recess while group IV finFETs are formed in a region of the substrate adjacent to the well recess. The well material may be electrically isolated from the substrate by an amorphous isolation material surrounding pillars passing through the isolation material that couple the well material to a seeding surface of the substrate and trap crystal growth defects. The pillars may be expanded over the well-isolation material by lateral epitaxial overgrowth, and the well recess filled with a single crystal of high quality. Well material may be planarized with adjacent substrate regions. N-type fin structures may be fabricated from the well material in succession with p-type fin structures fabricated from the substrate, or second epitaxial well.
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