Invention Grant
- Patent Title: Method for manufacturing array substrate, array substrate and display panel
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Application No.: US15329212Application Date: 2016-07-25
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Publication No.: US10461178B2Publication Date: 2019-10-29
- Inventor: Shi Shu , Jing Feng , Chuanxiang Xu , Xiaolong He , Jiushi Wang
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Brooks Kushman P.C.
- Priority: CN201610008575 20160107
- International Application: PCT/CN2016/091505 WO 20160725
- International Announcement: WO2017/117974 WO 20170713
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/786 ; H01L29/66 ; H01L27/12

Abstract:
A method for manufacturing an array substrate, an array substrate and a display panel are provided. The method includes forming patterns of a gate metal layer and a gate insulating layer successively on a base plate, forming a pattern of a semiconductor layer, where the pattern of the semiconductor layer comprises a pattern of an active region and a pattern of a pixel electrode region, the semiconductor layer comprises an insulative oxide layer and a semiconductive oxide layer stacked on the insulative oxide layer, and the insulative oxide layer is located between the gate insulating layer and the semiconductive oxide layer, forming a pattern of a source and drain metal layer, and subjecting the semiconductive oxide layer in the pixel electrode region to plasma treatment, to convert the semiconductive oxide layer in the pixel electrode region into a conductor.
Public/Granted literature
- US20180308958A1 METHOD FOR MANUFACTURING ARRAY SUBSTRATE, ARRAY SUBSTRATE AND DISPLAY PANEL Public/Granted day:2018-10-25
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