Invention Grant
- Patent Title: Radiation source
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Application No.: US16143018Application Date: 2018-09-26
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Publication No.: US10461490B2Publication Date: 2019-10-29
- Inventor: Yongfeng Ni
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP17194047 20170929
- Main IPC: H01S3/067
- IPC: H01S3/067 ; G02F1/365 ; H01S3/094 ; H01S3/10 ; G03F7/20 ; G03F9/00 ; G02F1/35

Abstract:
A supercontinuum radiation source comprises: a radiation source, an optical amplifier and a non-linear optical medium. The radiation source is operable to produce a pulsed radiation beam. The optical amplifier is configured to receive the pulsed radiation beam and increase an intensity of the pulsed radiation beam. The non-linear optical medium is configured to receive the amplified pulsed radiation beam and to broaden its spectrum so as to generate a supercontinuum radiation beam. The optical amplifier may supply a pump radiation beam to a gain medium, an intensity of the pump radiation beam being periodic and having a pump frequency that is an integer multiple of the frequency of the pulsed radiation beam. The optical amplifier may supply pump energy to a gain medium only when the pulses of the pulsed radiation beam propagate through the gain medium.
Public/Granted literature
- US20190103721A1 Radiation Source Public/Granted day:2019-04-04
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