Invention Grant
- Patent Title: Scanning probe microscope and optical axis adjustment method for scanning probe microscope
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Application No.: US15249474Application Date: 2016-08-29
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Publication No.: US10466271B2Publication Date: 2019-11-05
- Inventor: Masafumi Watanabe , Toshihiro Ueno , Susumu Ito , Shoichi Hasegawa
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP Minato-ku, Tokyo
- Assignee: Hitachi High-Tech Science Corporation
- Current Assignee: Hitachi High-Tech Science Corporation
- Current Assignee Address: JP Minato-ku, Tokyo
- Agency: Banner & Witcoff, Ltd.
- Priority: JP2015-171866 20150901
- Main IPC: G01Q20/02
- IPC: G01Q20/02

Abstract:
A scanning probe microscope includes: a cantilever; a cantilever supporting portion; a movement mechanism that moves a position of the cantilever; a light source that emits detection light; a detector that receives the detection light reflected on a reflecting surface of the cantilever; an objective lens; and a controller that controls the movement mechanism to perform a process including: detecting a spot position of a spot light of the detection light; detecting a position of the cantilever from an image captured by the imaging device; and controlling the movement mechanism based on the spot position, the position of the cantilever, an incident angle of the detection light, and the attachment angle such that the detection light is reflected on the reflecting surface when the cantilever is attached to the cantilever supporting portion.
Public/Granted literature
- US20170059609A1 SCANNING PROBE MICROSCOPE AND OPTICAL AXIS ADJUSTMENT METHOD FOR SCANNING PROBE MICROSCOPE Public/Granted day:2017-03-02
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