Press roller and imprint method using the same
Abstract:
A press roller for imprint method including: a roller body having a cylindrical shape extending in a first direction; an energy generating part disposed on a curved surface of the roller body, the energy generating part including a plurality of energy generating units configured to be individually controlled to emit energy; and a compensation layer disposed on the energy generating part, the compensation layer including a material that expands in volume when the energy is applied.
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