Invention Grant
- Patent Title: Capacitive transducer and acoustic sensor
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Application No.: US15901830Application Date: 2018-02-21
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Publication No.: US10469957B2Publication Date: 2019-11-05
- Inventor: Takashi Kasai , Yuki Uchida
- Applicant: OMRON Corporation
- Applicant Address: JP Kyoto
- Assignee: Omron Corporation
- Current Assignee: Omron Corporation
- Current Assignee Address: JP Kyoto
- Agency: Osha Liang LLP
- Priority: JP2016-047521 20160310
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R19/00 ; H04R1/22 ; H01L29/84 ; B81B3/00

Abstract:
A capacitive transducer includes a substrate having an opening in a surface thereof, a back plate facing the opening in the substrate, a vibration electrode film facing the back plate across a space, the vibration electrode film being displaceable to have a displacement converted into a change in capacitance between the vibration electrode film and the back plate, an airflow channel defined by a gap between a protrusion integral with the back plate and a part of the vibration electrode film, the airflow channel being configured to increase an area of air flow when the vibration electrode film deforms under pressure to move relative to the protrusion integral with the back plate and relieve the pressure applied to the vibration electrode film to serve as a pressure relief channel, and an extension formed at a periphery of a hole in the vibration electrode film defining the pressure relief channel.
Public/Granted literature
- US20180184212A1 CAPACITIVE TRANSDUCER AND ACOUSTIC SENSOR Public/Granted day:2018-06-28
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