Invention Grant
- Patent Title: Asymmetrical magnification inspection system and illumination module
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Application No.: US15412879Application Date: 2017-01-23
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Publication No.: US10481101B2Publication Date: 2019-11-19
- Inventor: Haim Feldman , Boris Golberg , Ido Dolev
- Applicant: APPLIED MATERIALS ISRAEL LTD.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/95 ; G02B21/00 ; G02B21/06 ; G02B27/09 ; G02B26/08

Abstract:
An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.
Public/Granted literature
- US20180209915A1 ASYMMETRICAL MAGNIFICATION INSPECTION SYSTEM AND ILLUMINATION MODULE Public/Granted day:2018-07-26
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