Invention Grant
- Patent Title: MEMS sensor
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Application No.: US15904737Application Date: 2018-02-26
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Publication No.: US10481121B2Publication Date: 2019-11-19
- Inventor: Paul Wilson , Karthikeya Kodur
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Priority: GB1704396.9 20170320
- Main IPC: H03F3/45
- IPC: H03F3/45 ; G01N27/22 ; G01D5/241 ; H03F3/187 ; H04R19/00 ; G01D5/24 ; H04R3/06

Abstract:
This application relates to methods and apparatus for operating MEMS sensors, in particular MEMS capacitive sensors (CMEMS) such as a microphones. An amplifier apparatus (300) is arranged to amplify an input signal (VINP) received at a sense node (104) from the MEMS capacitive sensor. An antiphase signal generator (201; 304) generates a second signal (VINN) which is in antiphase with the input signal (VINP) and an amplifier arrangement (105; 305) is configured to receive the input signal (VINP) at a first input and the second signal (VINN) at a second input and to output corresponding amplified first and second output signals. This converts a single ended input signal effectively into a differential input signal.
Public/Granted literature
- US20180246052A1 MEMS SENSOR Public/Granted day:2018-08-30
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