Invention Grant
- Patent Title: System and method for non-contact measurement of optoelectronic properties of thin film
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Application No.: US15874415Application Date: 2018-01-18
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Publication No.: US10481188B2Publication Date: 2019-11-19
- Inventor: Minah Seo , Sanghun Lee , Chulki Kim , Q-Han Park , Jongho Choe , Jinsoo Kim
- Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
- Applicant Address: KR Seoul
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR Seoul
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2017-0118866 20170915
- Main IPC: G01R27/00
- IPC: G01R27/00 ; G01R27/26 ; G01N21/3563

Abstract:
Disclosed herein is a system for non-contact measurement of an optoelectronic property. The system includes a sensing element configured to amplify an electromagnetic wave having a specific frequency, a thin film disposed on the sensing element such that an optoelectronic property of the thin film is measured, and an optoelectronic property measuring server configured to extract a physical property of the thin film based on the optoelectronic property of the thin film obtained when the electromagnetic wave amplified by the sensing element passes through the thin film.
Public/Granted literature
- US20190086458A1 SYSTEM AND METHOD FOR NON-CONTACT MEASUREMENT OF OPTOELECTRONIC PROPERTIES OF THIN FILM Public/Granted day:2019-03-21
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