- 专利标题: Seal for microelectronic assembly
-
申请号: US15920759申请日: 2018-03-14
-
公开(公告)号: US10508030B2公开(公告)日: 2019-12-17
- 发明人: Rajesh Katkar , Liang Wang , Cyprian Emeka Uzoh , Shaowu Huang , Guilian Gao , Ilyas Mohammed
- 申请人: Invensas Bonding Technologies, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Invensas Bonding Technologies, Inc.
- 当前专利权人: Invensas Bonding Technologies, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L23/10
- IPC分类号: H01L23/10 ; B81C1/00 ; B81B7/00 ; H01L23/04 ; H01L23/053 ; H01L23/02
摘要:
Representative implementations of techniques and devices provide seals for sealing the joints of bonded microelectronic devices as well as bonded and sealed microelectronic assemblies. Seals are disposed at joined surfaces of stacked dies and wafers to seal the joined surfaces. The seals may be disposed at an exterior periphery of the bonded microelectronic devices or disposed within the periphery using the various techniques.
公开/授权文献
- US20180273377A1 Seal for microelectronic assembly 公开/授权日:2018-09-27
信息查询
IPC分类: