Invention Grant
- Patent Title: Sample holder, member mounting device, and charged particle beam apparatus
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Application No.: US15936155Application Date: 2018-03-26
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Publication No.: US10529533B2Publication Date: 2020-01-07
- Inventor: Toshiyuki Iwahori
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP
- Assignee: HITACHI HIGH-TECH SCIENCE Corporation
- Current Assignee: HITACHI HIGH-TECH SCIENCE Corporation
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2017-060906 20170327
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26

Abstract:
A sample holder, a member mounting device, and a charged particle beam apparatus are able to secure a compatible configuration for the transfer of a sample between different-type charged particle beam apparatuses without an increase in equipment costs. The charged particle beam apparatus includes a holder unit for removably fastening a sample holder for receiving a sample, and a sample stage unit for loading the holder unit in a sample chamber. The sample holder includes a sample holding member for receiving a sample, a support section for supporting the sample holding member, and a clip disposed on the support section at a position where the sample holding member is disposed.
Public/Granted literature
- US20180277336A1 SAMPLE HOLDER, MEMBER MOUNTING DEVICE, AND CHARGED PARTICLE BEAM APPARATUS Public/Granted day:2018-09-27
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