Sample holder, member mounting device, and charged particle beam apparatus
Abstract:
A sample holder, a member mounting device, and a charged particle beam apparatus are able to secure a compatible configuration for the transfer of a sample between different-type charged particle beam apparatuses without an increase in equipment costs. The charged particle beam apparatus includes a holder unit for removably fastening a sample holder for receiving a sample, and a sample stage unit for loading the holder unit in a sample chamber. The sample holder includes a sample holding member for receiving a sample, a support section for supporting the sample holding member, and a clip disposed on the support section at a position where the sample holding member is disposed.
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