An electrostatic discharge (ESD) protection device includes a substrate including a device region and an ESD protection structure formed on the substrate in the device region. The device region includes a center region and edge regions separated by the center region, while the ESD protection structure includes a plurality of gate structures. The ESD protection device also includes a dielectric layer formed to cover the plurality of gate structures and a plurality of heat dissipation structures formed on the dielectric layer with each heat dissipation structure aligned with a corresponding gate structure along a direction perpendicular to a surface of the substrate. The area size of each heat dissipation structure aligned with a corresponding gate structure in the center region is larger than the area size of each heat dissipation structure aligned with a corresponding gate structure in the edge region.