- 专利标题: Plasma processing apparatus
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申请号: US13363427申请日: 2012-02-01
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公开(公告)号: US10541115B2公开(公告)日: 2020-01-21
- 发明人: Yusaku Sakka , Ryoji Nishio , Tadayoshi Kawaguchi
- 申请人: Yusaku Sakka , Ryoji Nishio , Tadayoshi Kawaguchi
- 申请人地址: JP Tokyo
- 专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人: HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Baker Botts L.L.P.
- 优先权: JP2011-220611 20111005
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
In a plasma processing apparatus that can adjust an induction magnetic field distribution of power feeding sections of an induction coil, correct a plasma distribution on a specimen, and apply uniform plasma processing to the specimen, the specimen is subjected to plasma processing, a dielectric window that forms the upper surface of the vacuum processing chamber, a gas lead-in section that leads gas into the vacuum processing chamber, a specimen table that is arranged in the vacuum processing chamber and on which the specimen is placed, an induction coil provided above the dielectric window, and a radio-frequency power supply that supplies radio-frequency power to the induction coil. The plasma processing apparatus includes a flat conductor arranged below the induction coil. The induction coil includes crossing power feeding sections. The conductor is arranged below the power feeding sections.
公开/授权文献
- US20130087288A1 PLASMA PROCESSING APPARATUS 公开/授权日:2013-04-11