Invention Grant
- Patent Title: Piezoelectric element having improved sensitivity, method for manufacturing the same and piezoelectric sensor
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Application No.: US15535423Application Date: 2016-08-18
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Publication No.: US10545059B2Publication Date: 2020-01-28
- Inventor: Xueyan Tian
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Calfee, Halter & Griswold LLP
- Priority: CN201610003582 20160104
- International Application: PCT/CN2016/095853 WO 20160818
- International Announcement: WO2017/118032 WO 20170713
- Main IPC: G01L9/08
- IPC: G01L9/08 ; H01L41/04 ; H01L41/047 ; G01L1/16 ; H01L41/113 ; H01L41/187 ; H01L41/29 ; H01L41/312 ; H01L41/333 ; H01L41/335
Abstract:
A piezoelectric element includes: a piezoelectric part; a first substrate and a second substrate, provided at both sides of the piezoelectric part, respectively; a first electrode layer, located between the first substrate and the piezoelectric part; and a second electrode layer, located between the electrode substrate and the piezoelectric part, wherein a surface of at least one of the first substrate and the second substrate close to the piezoelectric part is provided with a convex portion.
Public/Granted literature
- US20180106689A1 PIEZOELECTRIC ELEMENT, METHOD FOR MANUFACTURING THE SAME AND PIEZOELECTRIC SENSOR Public/Granted day:2018-04-19
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