Invention Grant
- Patent Title: Optimized double-gate transistors and fabricating process
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Application No.: US16039771Application Date: 2018-07-19
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Publication No.: US10546929B2Publication Date: 2020-01-28
- Inventor: François Andrieu , Remy Berthelon
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Paris FR Crolles
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee Address: FR Paris FR Crolles
- Agency: Baker & Hostetler LLP
- Priority: FR1756834 20170719; FR1761404 20171130
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L29/10 ; H01L27/12 ; H01L29/06 ; H01L21/266 ; H01L21/8238 ; H01L21/84 ; H01L21/74 ; H01L27/092

Abstract:
An integrated circuit includes a substrate; a buried insulating layer; at least one nMOS transistor comprising a semiconductor layer placed above the buried insulating layer; at least one pMOS transistor comprising a semiconductor layer placed above the buried insulating layer; at least one semiconductor groundplane that may be doped or a metal, placed above the substrate and below the buried insulating layer, said buried plane being common to the nMOS transistor and to the pMOS transistor; at least one gate insulator and a gate that is common to the nMOS transistor and to the pMOS transistor and that is located above the channel of these transistors and facing the groundplane, the area of the groundplane at least covering the area of the gate in vertical projection; the nMOS transistor being separated from the pMOS transistor by an isolation defined between the semiconductor layer of the nMOS transistor and the semiconductor layer of the pMOS transistor, the isolation being located in the buried insulating layer and making contact with the groundplane; at least one shared contact making electrical contact with the common gate and with the common groundplane, the shared contact passing through the buried insulating layer or the isolation.
Public/Granted literature
- US20190027560A1 TRANSISTORS DOUBLE GRILLES OPTIMISES ET PROCEDE DE FABRICATION Public/Granted day:2019-01-24
Information query
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