- Patent Title: Method for manufacturing semiconductor device having thinned fins
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Application No.: US15409947Application Date: 2017-01-19
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Publication No.: US10546946B2Publication Date: 2020-01-28
- Inventor: Masaaki Shinohara
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Tokyo
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2016-033597 20160224
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
Provided is a stable manufacturing method for a semiconductor device. In the manufacturing method for a semiconductor device, first, fins with an equal width are formed in each of a memory cell portion and a logic portion of a semiconductor substrate. Then, the fins in the logic portion are etched with the fins in the memory cell covered with a mask film, thereby fabricating fins in the logic portion, each of which is narrower than the fin formed in the memory cell portion.
Public/Granted literature
- US20170243955A1 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2017-08-24
Information query
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